I really wouldn't delete that...
I'm not entirely sure about this, but I tell you my logic.
Mach is the name of the kernel that Darwin uses (Mac OS X). On most linux systems the current kernel version is referenced with a symlink like "kernel -> /kernel/build/kernel2.34.673" or something. When a new kernel is installed, it just repoints the "kernel" symlink.
This is so that programmers can hard-code various paths into their programs without having to detect the path.
I would surmise that this is the case with /mach. Also note that MacMachBegone makes the files invisible, it does not delete them!
Secondly, if you have only booted OS X once since 2001, why did you install it to begin with? A full install of a Mac OS X system takes around 1.5 to 2.4 gigs I think, whereas you can fit a whole Classic system onto a single CD.